Writing Nanostructures: Heated AFM Tip Allows Plastic and CMOS-Compatible Direct Fabrication of Ferroelectric Piezoelectric Structures

Georgia Institute of Technology Research News.
July 18, 2011

Using a technique known as thermochemical nanolithography (TCNL), researchers have developed a new way to fabricate nanometer-scale ferroelectric structures directly on flexible plastic substrates that would be unable to withstand the processing temperatures normally required to create such nanostructures.

The technique, which uses a heated atomic force microscope (AFM) tip to produce patterns, could facilitate high-density, low-cost production of complex ferroelectric structures for energy harvesting arrays, sensors and actuators in nano-electromechanical systems (NEMS) and micro-electromechanical systems (MEMS). The research was reported July 15 in the journalAdvanced Materials.

“We can directly create piezoelectric materials of the shape we want, where we want them, on flexible substrates for use in energy harvesting and other applications,” said Nazanin Bassiri-Gharb, co-author of the paper and an assistant professor in the School of Mechanical Engineering at the Georgia Institute of Technology. “This is the first time that structures like these have been directly grown with a CMOS-compatible process at such a small resolution. Not only have we been able to grow these ferroelectric structures at low substrate temperatures, but we have also been able to pattern them at very small scales.”
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